Unidirectional Flow Cleanroom
Comparison of clean room types
Cleanroom Class
ISO 14644-1:2015潔淨度等級
| 潔淨度等級 | 上限濃度（個/m3） | ||||||
|---|---|---|---|---|---|---|---|
| ISO 14644-1 | Fed.Std-209E | 0.1μm | 0.2μm | 0.3μm | 0.5μm | 1μm | 5μm |
| Class 1 | 10 | 2015版廢除 | |||||
| Class 2 | 100 | 24 | 10 | 2015版廢除 | |||
| Class 3 | Class 1 | 1,000 | 237 | 102 | 35 | 2015版廢除 | |
| Class 4 | Class 10 | 10,000 | 2,370 | 1,020 | 352 | 83 | |
| Class 5 | Class 100 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 2015版廢除 |
| Class 6 | Class 1,000 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
| Class 7 | Class 10,000 | 352,000 | 83,200 | 2,930 | |||
| Class 8 | Class 100,000 | 3,520,000 | 832,000 | 29,300 | |||
| Class 9 | 35,200,000 | 8,320,000 | 293,000 | ||||
| ISO 14644-1 | Fed.Std-209E | 0.1μm | 0.2μm | 0.3μm | 0.5μm | 1μm | 5μm |
Comparison of clean room types
無塵室種類
| 種類 |
適用潔淨 等級 |
風速（m/s） | 換氣次數（次/hr） | 出回風配置 | 優點 | 缺點 | 建置成比*1 |
|---|---|---|---|---|---|---|---|
| 垂直層流 |
Class 1~100 |
0.25~0.40 | 200~600 |
出風：天花板上出風 回風：地板回風 |
|
|
100% |
| 水準層流 | Class 1 | 0.45~0.50 | 200~600 |
出風：牆面高80%以上側面出風 回風：牆面高40%以上 |
|
|
50~80% |
|
Class 1000 |
100~200 | 30~50% | |||||
| 亂流式 | Class 1000~100000 | 30~60 |
出風：天花版上出風 回風：地板或壁面低處回風皆可 |
|
|
10~40% |